arXiv preprint ·
Uncertainty-aware Feedback Loop Diagnosis: integrating reinforcement learning and conformal prediction for reliable wafer defect classification
- Published
- Source
- arXiv preprint, posted before peer review
- Original
- Read it at arXiv
- Topics
Abstract
Semiconductor manufacturing is a complex, multi-step process that requires both high precision and low operating costs. Therefore, detecting defects in a high-volume setting is an important component of wafer map analysis for reliable production. However, most state-of-the-art deep learning approaches require a full scan of the surface, which hinders the development of high-throughput inspection systems. To address this problem, we propose Uncertainty-aware Feedback Loop Diagnosis (UFLD), a novel algorithm that employs reinforcement learning for adaptive measurement acquisition and provides a prediction uncertainty level after each step, stopping the process once sufficient information is obtained. Unlike existing methods that rely on ensemble models or auxiliary confidence estimation deep learning models, UFLD utilizes a more parameter-efficient conformal prediction framework to determine the optimal stopping time. The proposed UFLD reduces acquisition time by about $40\%$ and achieves $98.4\%$ inspection accuracy, without requiring an additional learned confidence-estimation network. We validated our approach on the MixedWM38 dataset, demonstrating its advantages over existing adaptive acquisition procedures and standard convolutional neural networks.
The authors’ abstract, as arXiv lists it. arXiv’s listings, abstracts included, are free for anyone to reuse.
Read it on ReadSearch
Each opens after you create an account, and brings you back to this paper.
More in Machine Learning
Kinematic Causal Attribution: Black-Box Explanations of Motion versus Geometry for 4D Point-Cloud Video Models
An Empirical Study on Learning Rooftop Solar Potential from Satellite Imagery Directly Without Explicit Geometry
STRATA: Reinforcement-driven Active Sampling with Tri-paradigm Adaptation for Efficient 3D Spatial Transcriptomics
CompoSET: A Controlled Single-Edit Benchmark for Vision-Language Compositionality
VEvo-Harness: Causally-Guarded Self-Evolving Harness for Agentic Image Generation
Get the few papers worth your time in Machine Learning every morning.
ReadSearch reads the new papers in your field each day and brings you the few worth reading, each with its key finding in a sentence.