arXiv preprint ·
Nondestructive 3D Metrology of Through-Glass Via Geometry and Internal Wall Texture Using Holotomography
- Published
- Source
- arXiv preprint, posted before peer review
- Original
- Read it at arXiv
- Topics
Abstract
Through-glass vias (TGVs) are increasingly important for semiconductor packaging, yet their internal geometry and wall texture remain difficult to characterize nondestructively. Here, we use holotomography (HT) to inspect the three-dimensional (3D) geometry and internal wall texture of intact, unfilled TGVs before metallization. HT reconstructs the refractive index (RI) distribution of the glass and via. Maps of RI and spatially filtered RI then localize the internal boundary. Geometric fitting quantifies via dimensions and taper, while spatial filtering separates slowly varying wall form from finer texture. The reconstructed surface supports volumetric visualization, dimensional measurements and spatial characterization of wall texture within one optical inspection workflow. These measurements reveal internal features inaccessible from surface views and provide quantitative descriptors to evaluate TGVs
The authors’ abstract, as arXiv lists it. arXiv’s listings, abstracts included, are free for anyone to reuse.
Read it on ReadSearch
Each opens after you create an account, and brings you back to this paper.
More in Optics
PETE: A Hybrid Photonic and Electronic Thermoelectric Device for Direct Heat-to-Electricity Conversion
Optical Detection of Coefficient of Thermal Expansion via Frequency Tracking at Cryogenic Temperatures
From Rock Tumbling to Telescope Mirror Grinding: How Optical Perfection Emerges from Random Motion
Nearly Transform-Limited Pulse-Like Temporal and Narrowband Spectral Responses in Sum-Frequency Generation from Bright Twin Beams
Learned optical compression for single-pixel quantitative phase imaging
Get the few papers worth your time in Optics every morning.
ReadSearch reads the new papers in your field each day and brings you the few worth reading, each with its key finding in a sentence.