arXiv preprint ·

A photonic-integrated optomechanical mid-infrared detector

Guillermo Arregui, Amirali Arabmoheghi, Alessio Zicoschi, Xinru Ji, Scott E. Kenning, Marco Golino, Shivaprasad U. Hulyal, Yi Xia, Sunil A. Bhave and Tobias J. Kippenberg

Published
Source
arXiv preprint, posted before peer review
Original
Read it at arXiv
Topics
OpticsApplied Physics

Abstract

Tracking the resonance frequency of a mechanical oscillator is the basis of atomic force microscopy, mass sensing and thermometry. Nanomechanical thermal detectors exploit this principle to sense absorbed radiation, most effectively with tensile-stressed resonators, whose tension converts thermal expansion into a large frequency shift and dilutes dissipation. Approaching their fundamental sensitivity limit, however, has required free-space or fibre-coupled interferometers, hindering compact deployment and scaling to arrays. Here we remove this bottleneck by monolithically integrating a high-Q nanomechanical resonator with a silicon nitride photonic integrated circuit. A tensile-stressed silicon nitride trampoline with an impedance-matched platinum absorber is dispersively coupled to a photonic integrated microresonator beneath it. At room temperature and with microwatt-level optical power, the detector reaches a noise-equivalent power of 3.4 pW/$\sqrt{\rm Hz}$ for broadband thermal radiation (3-12 $μ$m), referred to incident power. Referred to absorbed power, this is within a factor of 1.5 of its fundamental thermal fluctuation limit. Using our detector in a state-of-the-art commercial Fourier-transform infrared spectrometer, we resolve the vibrational fingerprint of a polymer film across 2-20 $μ$m and reach the precision of the built-in pyroelectric detector with about an order of magnitude lower incident power. This architecture opens a route to multiplexed optomechanical focal-plane arrays.

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