arXiv preprint ·
Feature identification for parameter extraction and defect detection using machine learning
- Published
- Source
- arXiv preprint, posted before peer review
- Published in
- Metrology, Inspection, and Process Control XXXVI
- DOI
- 10.1117/12.3011237
- Original
- Read it at arXiv
- Cited by
- 1 work, as OpenAlex counts them
- Topics
In brief
Teaching Microscopes to Find the Right Details
The paper presents a general framework for using images from high-speed scanning probe microscopy systems to train machine-learning networks. The framework is aimed at two tasks: identifying structural features for parameter extraction and identifying defects.
What they found: The paper presents a framework for training networks on high-speed scanning probe microscopy images for two applications: feature detection to extract parameters and defect identification. The motivation is the need to inspect increasingly complex 3D structures and nanoscale defects while maintaining the throughput required in high-volume manufacturing.
AI-written summary. Check anything you rely on against the original paper.
Abstract
Process control of advanced semiconductor nodes is not only pushing the limits of metrology equipment requirements in terms of resolution and throughput but also in terms of the richness of data to be extracted to enable engineers to finetune the process steps for increased yield. The move towards 3D structures requires extraction of critical dimension parameters from structures which can vary largely from layer to layer. For in-line process control, the necessary automation forces the development of layer and equipment-specific dedicated image processing algorithms. Similarly, with the increase in stochastic defects in the EUV era, detection of defects at the nm scale requires the identification of features captured in low resolution to meet the throughput requirements of HVM fabs, which can again lead to custom algorithm development. With the emergence of ML-based image processing methods, this process of algorithm development for both cases can be accelerated. In this work, we provide the general framework under which the images obtained from high-speed scanning probe microscopy-based systems can be used to train a network for either feature detection for parameter extraction or defect identification.
The authors’ abstract, as arXiv lists it. arXiv’s listings, abstracts included, are free for anyone to reuse.
Read it on ReadSearch
Each opens after you create an account, and brings you back to this paper.
More in Machine Learning
Visual Grounding Safety in Vision-Language Models
SkillFormer: Skill-Decomposed Adaptation for Audio Language Models
Spacecraft Rendezvous Trajectory Generation with Modular Constraints via Diffusion Model Composition
Preserving Unstable Modes Through Inverse Dynamics in JEPA World Models
When Does a Diffusion Model Decide What to Draw ?
Get the few papers worth your time in Machine Learning every morning.
ReadSearch reads the new papers in your field each day and brings you the few worth reading, each with its key finding in a sentence.